JPS6122256B2 - - Google Patents
Info
- Publication number
- JPS6122256B2 JPS6122256B2 JP5300380A JP5300380A JPS6122256B2 JP S6122256 B2 JPS6122256 B2 JP S6122256B2 JP 5300380 A JP5300380 A JP 5300380A JP 5300380 A JP5300380 A JP 5300380A JP S6122256 B2 JPS6122256 B2 JP S6122256B2
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen
- concentration
- semiconductor detection
- gas
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 57
- 239000004065 semiconductor Substances 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 41
- 239000007789 gas Substances 0.000 claims description 19
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 18
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 14
- 239000000463 material Substances 0.000 description 15
- 230000035945 sensitivity Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910002089 NOx Inorganic materials 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000009614 chemical analysis method Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004204 optical analysis method Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5300380A JPS56150340A (en) | 1980-04-23 | 1980-04-23 | Semiconductor detector for nitrogen oxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5300380A JPS56150340A (en) | 1980-04-23 | 1980-04-23 | Semiconductor detector for nitrogen oxide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56150340A JPS56150340A (en) | 1981-11-20 |
| JPS6122256B2 true JPS6122256B2 (en]) | 1986-05-30 |
Family
ID=12930734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5300380A Granted JPS56150340A (en) | 1980-04-23 | 1980-04-23 | Semiconductor detector for nitrogen oxide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56150340A (en]) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6121956U (ja) * | 1984-07-12 | 1986-02-08 | 新コスモス電機株式会社 | 複合型ガス検知警報装置 |
| JP3510447B2 (ja) * | 1997-03-19 | 2004-03-29 | 日本碍子株式会社 | ガス濃度測定方法 |
| JP6061790B2 (ja) | 2012-08-30 | 2017-01-18 | 日本特殊陶業株式会社 | 酸化触媒の劣化診断装置 |
| CN105699441B (zh) * | 2016-03-24 | 2018-04-13 | 电子科技大学 | 一种电阻式气体传感器及其制备方法 |
| JP6810345B2 (ja) * | 2016-12-02 | 2021-01-06 | 富士通株式会社 | ガスセンサ及びガス検知システム |
-
1980
- 1980-04-23 JP JP5300380A patent/JPS56150340A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56150340A (en) | 1981-11-20 |
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